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Lithography-Hotspot-Detection

Detected Hotspots in the Lithography process using Vision Transformers, Convolution Neural Networks and Artificial Neural Networks, and compared the results obtained using ANNs & CNNs

artificial-neural-networks convolutional-neural-networks deep-learning hotspot-detection lithography-hotspot vision-transformer

Creat：2020-12-23T03:23:29

Update：2025-03-25T16:42:09

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